4 January 2008 MEMS for vibration energy harvesting
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In this paper, a capacitive vibration-to-electrical energy harvester was designed. An integrated process flow for fabricating the designed capacitive harvester is presented. For overcoming the disadvantage of depending on external power source in capacitive energy harvester, two parallel electrodes with different work functions are used as the two electrodes of the capacitor to generate a build-in voltage for initially charging the capacitor. The device is a sandwich structure of silicon layer in two glass layers with area of about 1 cm2. The silicon structure is fabricated by using silicon-on-insulator (SOI) wafer. The glass wafers are anodic bonded on to both sides of the SOI wafer to create a vacuum sealed package.
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Lin Li, Lin Li, Yangjian Zhang, Yangjian Zhang, Haisheng San, Haisheng San, Yinbiao Guo, Yinbiao Guo, Xuyuan Chen, Xuyuan Chen, } "MEMS for vibration energy harvesting", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683610 (4 January 2008); doi: 10.1117/12.756153; https://doi.org/10.1117/12.756153


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