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4 January 2008 An optical scanner based on cantilever-type electrostatic zipping actuators
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Abstract
This paper discusses modeling, design, fabrication and characterization of an optical scanner based on cantilever-type electrostatic zipping actuators. The electrostatic actuator has been designed to achieve high displacements for large optical scanning angles at lower actuation voltages. The zipping actuators are fabricated using multi-layer polysilicon foundry fabrication processes. The electrostatic force between the cantilever and the bottom electrode on the substrate pulls the cantilever down. With a warped cantilever, the force closes the gap from the anchored end and gradually the zipping effect actuates the entire cantilever. In our design, mechanical structures are arranged to avoid electrical shortcircuit. With various annealing temperatures, the warped angles are controllable. The cantilever serves as a reflective surface and the high out-of-plane displacement is used to steer a reflected laser beam for imaging and scanning applications. In this paper we present the design considerations in electrostatic zipping actuator displacement and control as well as the arrangement for optical scanning.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Smitha M. N. Rao, Praveen Pandojirao-Sunkojirao, Naresh Dhaubanjar, Mu Chiao, and J.-C. Chiao "An optical scanner based on cantilever-type electrostatic zipping actuators", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683617 (4 January 2008); https://doi.org/10.1117/12.767801
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