8 January 2008 Tunable thin-film filters of multiple-channel based on thermo-optic
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Abstract
A tunable thin-film filter of multi-channel based on thermo-optic is designed. The filer is made of amorphous silicon and silicon nitride layers grown by PECVD. Multiple-channel filer is obtained by designing the structure of the cavity. Due to the excellent thermo-optical property of a-Si, the refractive index of the cavity will be changed by heating; the filter's peaks wavelength and the width between adjacent routeways will therefore shift substantially. The tuning range is >17nm and the tuning coefficient (dλ/dT) is 0.085nm/K.
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Dong Tian, Shuang Liu, Bing-yi Wang, "Tunable thin-film filters of multiple-channel based on thermo-optic", Proc. SPIE 6838, Optoelectronic Devices and Integration II, 68381W (8 January 2008); doi: 10.1117/12.757344; https://doi.org/10.1117/12.757344
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