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20 February 2008 Laser microfabrication in industry - perspectives from the past, present and future
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Abstract
Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser microfabrication as a technology that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper reviews the historical developments of laser microfabrication, highlights some of its current important industrial applications and takes a forward look at possible developments of the technology.
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Malcolm Gower "Laser microfabrication in industry - perspectives from the past, present and future", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 687902 (20 February 2008); https://doi.org/10.1117/12.774095
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