14 February 2008 Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source
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Abstract
The results of a comparative investigation on the emission characteristics of debris from CO2 laser-produced tin plasma and Nd: YAG laser-produced tin plasma for an extreme ultraviolet lithography (EUV) light source. The tin ions and droplets emitted from tin plasma produced by a CO2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. The large size of droplets was also observed by silicon substrates as witness plates. A higher ion kinetic energy and lower debris emission in the case of CO2 laser in compared with Nd: YAG laser for the same laser energy of ~50 mJ. In addition, the dynamics of the neutral atoms and the irradiated target from an Nd:YAG laser-produced tin plasma with a mass-limited micro-droplet target were investigated by imaging techniques.
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D. Nakamura, D. Nakamura, K. Tamaru, K. Tamaru, T. Akiyama, T. Akiyama, A. Takahashi, A. Takahashi, T. Okada, T. Okada, } "Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 687909 (14 February 2008); doi: 10.1117/12.767894; https://doi.org/10.1117/12.767894
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