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26 February 2008 Pulsed laser ablation of polymers for display applications
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Abstract
Laser micromachining by ablation is a well established technique used for the production of 2.5D and 3D features in a wide variety of materials. The fabrication of stepped, multi-level, structures can be achieved using a number of binary mask projection techniques using excimer lasers. Alternatively, direct-writing of complex 2.5D features can easily be achieved with solid-state lasers. Excimer laser ablation using half-tone masks allows almost continuous surface relief and the generation of features with low surface roughness. We have developed techniques to create large arrays of repeating micro-optical structures on polymer substrates. Here, we show our recent developments in laser structuring with the combination of half-tone and binary mask techniques.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James E. A. Pedder, Andrew S. Holmes, and Heather J. Booth "Pulsed laser ablation of polymers for display applications", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790S (26 February 2008); https://doi.org/10.1117/12.778180
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