Characterization of high performance polymers transferred by resonant infrared laser ablation

Nicole L. Dygert; Richard F. Haglund Jr.

doi:10.1117/12.763919

14 February 2008 Characterization of high performance polymers transferred by resonant infrared laser ablation

Nicole L. Dygert, Richard F. Haglund Jr.

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 68790Z (2008) https://doi.org/10.1117/12.763919
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

A polyamide imide and a polymeric precursor to polyimide have both been successfully transferred using resonant infrared laser ablation. Additionally a random copolymer mixture, possessing structural features common to polyimide and polyamide imide, was readily transferred using resonant infrared laser ablation. The materials are transferred with local structure intact as evidenced by Fourier transform infrared spectroscopy studies. The deposition rates of the polyimide precursor were examined at various wavelengths using a quartz crystal microbalance mounted in the deposition chamber. The effect of target type on deposition rate was also examined using two different 20 wt% polyamide imide solutions in N-methyl pyrrolidinone and dimethyl formamide and a solid pressed pellet target of polyamide imide. Both wavelength and target form were found to have a discernible effect on deposition rate. The deposited material was examined using a combination of profilometry and optical microscopy. The results show highly rough films with large, dark, string-like polymeric moieties on the surface.

Citation Download Citation

Nicole L. Dygert and Richard F. Haglund Jr. "Characterization of high performance polymers transferred by resonant infrared laser ablation", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790Z (14 February 2008); https://doi.org/10.1117/12.763919

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