Laser sintering of direct write silver nano-ink conductors for microelectronic applications

Adeyl Khan; Nicholas Rasmussen; Valery Marinov; Orven F. Swenson

doi:10.1117/12.759164

20 February 2008 Laser sintering of direct write silver nano-ink conductors for microelectronic applications

Adeyl Khan, Nicholas Rasmussen, Valery Marinov, Orven F. Swenson

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 687910 (2008) https://doi.org/10.1117/12.759164
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

Direct Write Technologies are reaching the goal of entirely printable microelectronic devices on flexible polymeric substrates. In the present work, nanoparticle inks deposited on low temperature polyimide substrates using Maskless Mesoscale Material Deposition (M3D®) technology were laser sintered using a continuous wave 1.06 micron Nd:YAG laser. In-situ measurements were made during sintering to capture the dynamic change in bulk resistivity as a function of deposited energy per volume of sintered material. It was shown that less than 0.05-μJ/μm³ started the sintering and 0.34-μJ/μm³ was enough for sintering the deposited samples regardless of initial resistance.

Citation Download Citation

Adeyl Khan, Nicholas Rasmussen, Valery Marinov, and Orven F. Swenson "Laser sintering of direct write silver nano-ink conductors for microelectronic applications", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 687910 (20 February 2008); https://doi.org/10.1117/12.759164

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