Observation of self-assembled periodic nano-structures induced by femtosecond laser in both ablation and deposition regimes

Mingzhen Tang; Haitao Zhang; Tsing-Hua Her

doi:10.1117/12.763790

14 February 2008 Observation of self-assembled periodic nano-structures induced by femtosecond laser in both ablation and deposition regimes

Mingzhen Tang, Haitao Zhang, Tsing-Hua Her

Author Affiliations +

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 68791J (2008) https://doi.org/10.1117/12.763790
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

We observed the spontaneous formation of periodic nano-structures in both femtosecond laser ablation and deposition. The former involved 400-nm femtosecond pulses from a 250-KHz regenerated amplified mode-locked Ti:sapphire laser and periodic nanocracks and the nano-structure are in the form of periodic nanocracks in the substrate, the latter applied an 80-MHz mode-locked Ti:sapphire oscillator with pulse energy less than half nanojoule in a laser-induced chemical vapor deposition configuration and tungsten nanogratings grow heterogeneously on top of the substrates. These two observed periodic nanostructures have opposite orientations respecting to laser polarization: the periodic nanocracks are perpendicular to, whereas the deposited tungsten nanogratings are parallel to laser polarization direction. By translating the substrate respecting to the laser focus, both the periodic nanocrack and tungsten nanograting extend to the whole scanning range. The deposited tungsten nanogratings possess excellent uniformity on both the grating period and tooth length. Both the attributes can be tuned precisely by controlling the laser power and scanning speed. Furthermore, we discovered that the teeth of transverse tungsten nanogratings are self aligned along their axial direction during multiple scanning with appropriate offset between scans. We demonstrate the feasibility of fabricating large-area one-dimensional grating by exploiting such unique property. These distinct phenomena of nanocracks and tungsten nanogratings indicate different responsible mechanisms.

Citation Download Citation

Mingzhen Tang, Haitao Zhang, and Tsing-Hua Her "Observation of self-assembled periodic nano-structures induced by femtosecond laser in both ablation and deposition regimes", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68791J (14 February 2008); https://doi.org/10.1117/12.763790

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Tungsten

Teeth

Femtosecond phenomena

Polarization

Sapphire

Scanning electron microscopy

Laser ablation

Show All Keywords

Keywords/Phrases

Search In:

Publication Years