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26 February 2008 Precision microfabrication of AlN and Al2O3 ceramics by femtosecond laser ablation
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Abstract
The characteristics of femtosecond laser ablation of AlN and Al2O3 for precision microfabrication are studied experimentally. Specifically, the process characteristics during femtosecond laser drilling of microholes with sub-100 μm diameter are investigated for varying laser parameters and beam path designs for trepanning. The accumulation of sub-micrometer size particles within the hole is prevented using a blower and vent system. Through process optimization the microdrilling with good hole quality is achieved.
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Sung Hoon Kim, T. Balasubramani, Ik-Bu Sohn, Yong-Chul Noh, Jongmin Lee, Jee Bum Lee, and Sungho Jeong "Precision microfabrication of AlN and Al2O3 ceramics by femtosecond laser ablation", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68791O (26 February 2008); https://doi.org/10.1117/12.762701
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