Recent Developments With Metal-Oxide Multilayered U.V. Mirrors

Tran Khanh Vien; J. P. Delaboudiniere; Y. Lepetre

doi:10.1117/12.964833

9 April 1987 Recent Developments With Metal-Oxide Multilayered U.V. Mirrors

Tran Khanh Vien, J. P. Delaboudiniere, Y. Lepetre

Proceedings Volume 0688, Multilayer Structures & Laboratory X-Ray Laser Research; (1987) https://doi.org/10.1117/12.964833
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

In a previous paper on Si-SiO2 multilayered mirrors (1), we have shown that metal-oxyde systems can be an interesting alternative to metal-metal multilayered coatings for XUV optics in the range from 10 nm to 60 nm. In this paper, we report experimental results of studies made on : a) an Si-Si02 Fabry-Perot etalon b) an Al-Si02 multilayered mirror c) an Al-A1203 multilayered mirror

Citation Download Citation

Tran Khanh Vien, J. P. Delaboudiniere, and Y. Lepetre "Recent Developments With Metal-Oxide Multilayered U.V. Mirrors", Proc. SPIE 0688, Multilayer Structures & Laboratory X-Ray Laser Research, (9 April 1987); https://doi.org/10.1117/12.964833

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