Far rear surface focusing of femtosecond laser pulses for dicing display glass plates

Farid Ahmed; Chulki Min; Man Seop Lee; Hitoshi Sekita; Tetsumi Sumiyoshi; Masanao Kamata

doi:10.1117/12.762807

23 February 2008 Far rear surface focusing of femtosecond laser pulses for dicing display glass plates

Farid Ahmed, Chulki Min, Man Seop Lee, Hitoshi Sekita, Tetsumi Sumiyoshi, Masanao Kamata

Proceedings Volume 6880, Laser-based Micro- and Nanopackaging and Assembly II; 688009 (2008) https://doi.org/10.1117/12.762807
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

A potential method for precise and fast dicing of display glass plates is proposed in this study. This technique facilitates the micromachining of cavities in both front and rear surfaces for a single pass of laser beam. The influences of focusing depth, input pulse energy, and scanning speed of the laser beam are investigated to study the morphology of the front and rear surface cavities. A commercial femtosecond laser with pulse duration of 172 fs, center wavelength of 780 nm, and repetition rate of 1 kHz is used for introducing the cavities.

Citation Download Citation

Farid Ahmed, Chulki Min, Man Seop Lee, Hitoshi Sekita, Tetsumi Sumiyoshi, and Masanao Kamata "Far rear surface focusing of femtosecond laser pulses for dicing display glass plates", Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 688009 (23 February 2008); https://doi.org/10.1117/12.762807

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