23 February 2008 Far rear surface focusing of femtosecond laser pulses for dicing display glass plates
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Abstract
A potential method for precise and fast dicing of display glass plates is proposed in this study. This technique facilitates the micromachining of cavities in both front and rear surfaces for a single pass of laser beam. The influences of focusing depth, input pulse energy, and scanning speed of the laser beam are investigated to study the morphology of the front and rear surface cavities. A commercial femtosecond laser with pulse duration of 172 fs, center wavelength of 780 nm, and repetition rate of 1 kHz is used for introducing the cavities.
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Farid Ahmed, Farid Ahmed, Chulki Min, Chulki Min, Man Seop Lee, Man Seop Lee, Hitoshi Sekita, Hitoshi Sekita, Tetsumi Sumiyoshi, Tetsumi Sumiyoshi, Masanao Kamata, Masanao Kamata, } "Far rear surface focusing of femtosecond laser pulses for dicing display glass plates", Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 688009 (23 February 2008); doi: 10.1117/12.762807; https://doi.org/10.1117/12.762807
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