Pulsed-laser deposition of oxides: high-Tc superconductors and piezoelectrics

J. D. Pedarnig; K. Siraj; A. Moser; A. Vlad; M. A. Bodea; S. Roither; M. Peruzzi; J. Heitz; T. Stehrer; B. Praher; R. Viskup; D. Bäuerle

doi:10.1117/12.763496

23 February 2008 Pulsed-laser deposition of oxides: high-T_c superconductors and piezoelectrics

J. D. Pedarnig, K. Siraj, A. Moser, A. Vlad, M. A. Bodea, S. Roither, M. Peruzzi, J. Heitz, T. Stehrer, B. Praher, R. Viskup, D. Bäuerle

Author Affiliations +

Proceedings Volume 6880, Laser-based Micro- and Nanopackaging and Assembly II; 68800L (2008) https://doi.org/10.1117/12.763496
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

Pulsed-laser deposition (PLD) is an excellent technique to grow thin films and multi-layers of complex oxide materials. We present our recent results on deposition, characterization and nano-patterning of novel oxide high-temperature superconductors (HTS) and piezoelectric materials. HTS thin films of improved superconducting properties are fabricated from ceramic targets consisting of Y₂Ba₄CuMO_y (M = metal) nano-particles embedded in YBa₂Cu₃O₇ (YBCO) matrix. The nano-composite ceramics are UV-laser ablated and the optical plasma emission is monitored by laser - induced breakdown spectroscopy. The HTS films reveal superconducting critical current densities that depend on target composition and are strongly enhanced as compared to phase pure YBCO films. Application of HTS layers in future nano-electronic devices requires novel techniques for nano-patterning. Masked ion-beam structuring enables the nano-patterning of YBCO thin films in a direct and single-step process. Gallium orthophosphate (GaPO₄) thin films and piezoelectric ZnO multi-layers are reported also. GaPO₄ is an outstanding piezoelectric material with very high transition temperature (~ 970 °C). Epitaxial GaPO₄ films are fabricated on quartz substrates by PLD and thermal post-annealing. Long-term annealing at high temperature does not degrade the GaPO₄ films. Multi-layers of Al and Li doped ZnO are pulsed-laser deposited on various substrates and investigated for applications in thin film sensors.

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J. D. Pedarnig, K. Siraj, A. Moser, A. Vlad, M. A. Bodea, S. Roither, M. Peruzzi, J. Heitz, T. Stehrer, B. Praher, R. Viskup, and D. Bäuerle "Pulsed-laser deposition of oxides: high-T_c superconductors and piezoelectrics", Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 68800L (23 February 2008); https://doi.org/10.1117/12.763496

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