Laser direct micro-machining with top-hat-converted single mode lasers

O. Homburg; F. Toennissen; T. Mitra; V. Lissotschenko

doi:10.1117/12.762723

23 February 2008 Laser direct micro-machining with top-hat-converted single mode lasers

O. Homburg, F. Toennissen, T. Mitra, V. Lissotschenko

Proceedings Volume 6880, Laser-based Micro- and Nanopackaging and Assembly II; 68800R (2008) https://doi.org/10.1117/12.762723
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

Laser direct micro-machining processes are used in a variety of industries like inkjet printing, semiconductor processing, solar technology, flat-panel display production and medicine. Various kinds of materials, e.g. ceramics, metals, isolators, oxides, organics and semiconductors are being structured. In most cases pulsed single mode solid state lasers with an inhomogeneous Gaussian beam profile are employed, like YAG lasers and their harmonics. However, the quality and functionality of the generated structures and micro-systems as well as the speed of the process can be improved by the utilization of homogeneous top hat profiles. The beam shaping principle of refractive Gaussian-to-top-hat converters is shown. Compact beam shaper modules based on this principle have been developed - supporting most direct laser micro-machining applications. The resulting process advantages are demonstrated by selected application results, namely the drilling of holes and patterning of trenches for different kinds of materials.

Citation Download Citation

O. Homburg, F. Toennissen, T. Mitra, and V. Lissotschenko "Laser direct micro-machining with top-hat-converted single mode lasers", Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 68800R (23 February 2008); https://doi.org/10.1117/12.762723

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