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Advances in the fabrication of surface modified microfluidic devices in nonfluorescing UV cured materials
Parallel-kinematic-mechanism-based monolithic XY micropositioning stage with rotary comb drive actuators
Fabrication of integrated channel waveguides in polydimethylsiloxane (PDMS) using proton beam writing (PBW): applications for fluorescence detection in microfluidic channels
Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching
Sensitivity and stress effects of composite membranes with micro/macro porous silicon for pressure sensor applications