26 February 2008 Electrical properties of thin epoxy-based polymer layers filled with n-carbon black particles
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Abstract
The change of resistivity of the epoxy-based nanocomposite was studied in dependence on concentration of dispersed nanoparticles. The SU8 negative-tone photoresist was applied for the polymer matrix and the conductive carbon black powder for the fillings. The largest decrease of resistivity was obtained at 2-3 wt% of fillings whereas at loadings higher that 8 wt% it does not decreases further appreciably. The resistivity of the prepared nanocomposites becomes smaller after the UV-exposure. The applied nanofillings change the viscosity of the material but the spin-coating application still remains reliable and was approved to work well for concentrations of at least up to 3 wt%. The addition of nanofillings up to 2 wt% does not destroy the resolution of photolithography as seen on the standard test pattern with line widths from 2 to 10 μm.
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Marta Klanjšek Gunde, Marta Klanjšek Gunde, Nina Hauptman, Nina Hauptman, Marijan Maček, Marijan Maček, } "Electrical properties of thin epoxy-based polymer layers filled with n-carbon black particles", Proc. SPIE 6882, Micromachining and Microfabrication Process Technology XIII, 68820M (26 February 2008); doi: 10.1117/12.761618; https://doi.org/10.1117/12.761618
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