Fabrication approaches for metallo-dielectric plasmonic waveguides

Maziar P. Nezhad; Steve Zamek; Lin Pang; Yeshaiahu Fainman

doi:10.1117/12.768161

7 February 2008 Fabrication approaches for metallo-dielectric plasmonic waveguides

Maziar P. Nezhad, Steve Zamek, Lin Pang, Yeshaiahu Fainman

Proceedings Volume 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics; 68830S (2008) https://doi.org/10.1117/12.768161
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Different techniques for fabricating long-range plasmonic metallo-dielectric waveguides are discussed. The approaches depend strongly on the material system in use. Specific results are presented for SU8 and PDMS.

Citation Download Citation

Maziar P. Nezhad, Steve Zamek, Lin Pang, and Yeshaiahu Fainman "Fabrication approaches for metallo-dielectric plasmonic waveguides", Proc. SPIE 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, 68830S (7 February 2008); https://doi.org/10.1117/12.768161

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