A dual-reflective electrothermal MEMS micromirror for full circumferential scanning endoscopic imaging

Lei Wu; Huikai Xie

doi:10.1117/12.769621

6 February 2008 A dual-reflective electrothermal MEMS micromirror for full circumferential scanning endoscopic imaging

Lei Wu, Huikai Xie

Proceedings Volume 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface; 688508 (2008) https://doi.org/10.1117/12.769621
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

This paper reports the design, fabrication and measurements of a dual-reflective, single-crystal silicon based micromirror that can perform full circumferential scanning (FCS) for endoscopic optical coherence tomography (EOCT). In the proposed FCS-EOCT probe, two optical fibers are used to deliver light beams to either surface of the micromirror, which can rotate ±45° (or 90°) and thus a 180° optical scanning is obtained from each mirror surface, resulting in full circumferential scans. A novel surface- and bulk-combined micromachining process based on SOI wafers is developed for fabricating the dual reflective micromirror. The single-crystal-silicon device layer of SOI wafers is used for mirror flatness, and Al is coated on both sides for high reflectivity. With one light beam delivered to each mirror surface, full 360° scans have been observed. Other measured data include the resonant frequency: 328Hz, radius of curvatures: - 124 mm (front surface) and 127 mm (back surface), and the reflectances: 81.3% (front surface) and 79.0% (back surface).

Citation Download Citation

Lei Wu and Huikai Xie "A dual-reflective electrothermal MEMS micromirror for full circumferential scanning endoscopic imaging", Proc. SPIE 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688508 (6 February 2008); https://doi.org/10.1117/12.769621

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