Microfabricated implantable flow sensor for medical applications

Sheng Liu; Reginald Farrow; James L. Zunino III; Hee C. Lim; John Federici; Gordon Thomas

doi:10.1117/12.763795

12 February 2008 Microfabricated implantable flow sensor for medical applications

Sheng Liu, Reginald Farrow, James L. Zunino III, Hee C. Lim, John Federici, Gordon Thomas

Proceedings Volume 6886, Microfluidics, BioMEMS, and Medical Microsystems VI; 688606 (2008) https://doi.org/10.1117/12.763795
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

A RF wireless capacitive flow sensor is developed. The sensor has integrated inductor with the flow sensitive capacitors as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied flow. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139 MPa. The sensor has size of 10 mm × 4 mm × 0.5 μm. The sensor integrated two pressure sensors together and designed related to flow 5-20ml/hour. The deflection of different shape of membranes and the parameters of flow sensor sensitivity are discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.

Citation Download Citation

Sheng Liu, Reginald Farrow, James L. Zunino III, Hee C. Lim, John Federici, and Gordon Thomas "Microfabricated implantable flow sensor for medical applications", Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 688606 (12 February 2008); https://doi.org/10.1117/12.763795

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