13 February 2008 Highly integrated microfluidic sensors
Author Affiliations +
Abstract
We have developed fabrication techniques for creating suspended electrically addressable MEMS structures in microfluidic channels, as well as monolithic integration of sensors within microfluidic devices. As we will demonstrate, creative use of state-of-the-art MEMS fabrication techniques allows the integrated manufacturing of a number of sensors, for simultaneous measurement of, for example, flow velocity, thermal conductivity and normal stress. We will demonstrate the versatility of these techniques with an example of capillary viscosity sensor integrating independent flowrate, temperature, and pressure drop sensors.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dan E. Angelescu, Hua Chen, Jacques Jundt, Helene Berthet, Bruno Mercier, Frederic Marty, "Highly integrated microfluidic sensors", Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 688607 (13 February 2008); doi: 10.1117/12.764028; https://doi.org/10.1117/12.764028
PROCEEDINGS
9 PAGES


SHARE
Back to Top