13 February 2008 Highly integrated microfluidic sensors
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We have developed fabrication techniques for creating suspended electrically addressable MEMS structures in microfluidic channels, as well as monolithic integration of sensors within microfluidic devices. As we will demonstrate, creative use of state-of-the-art MEMS fabrication techniques allows the integrated manufacturing of a number of sensors, for simultaneous measurement of, for example, flow velocity, thermal conductivity and normal stress. We will demonstrate the versatility of these techniques with an example of capillary viscosity sensor integrating independent flowrate, temperature, and pressure drop sensors.
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Dan E. Angelescu, Dan E. Angelescu, Hua Chen, Hua Chen, Jacques Jundt, Jacques Jundt, Helene Berthet, Helene Berthet, Bruno Mercier, Bruno Mercier, Frederic Marty, Frederic Marty, } "Highly integrated microfluidic sensors", Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 688607 (13 February 2008); doi: 10.1117/12.764028; https://doi.org/10.1117/12.764028

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