Microchips fabricated by femtosecond laser micromachining in glass for observation of aquatic microorganisms

Y. Hanada; K. Sugioka; H. Kawano; I. Ishikawa; A. Miyawaki M.D.; K. Midorikawa

doi:10.1117/12.762966

12 February 2008 Microchips fabricated by femtosecond laser micromachining in glass for observation of aquatic microorganisms

Y. Hanada, K. Sugioka, H. Kawano, I. Ishikawa, A. Miyawaki M.D., K. Midorikawa

Author Affiliations +

Proceedings Volume 6886, Microfluidics, BioMEMS, and Medical Microsystems VI; 68860D (2008) https://doi.org/10.1117/12.762966
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

We demonstrate the fabrication of three-dimensional (3D) hollow microstructures embedded in photostructurable glass by a nonlinear multiphoton absorption process using a femtosecond (fs) laser. Fs laser direct writing followed by annealing and successive wet etching in dilute hydrofluoric (HF) acid solution resulted in the rapid manufacturing of microchips with 3-D hollow microstructures for the dynamic observation of living microorganisms in fresh water. The embedded microchannel structure enables us to analyze the continuous motion of Euglena gracilis and Dinoflagellate. Such microchips, referred to as nano-aquariums realize the efficient and highly functional observation of microorganisms.

Citation Download Citation

Y. Hanada, K. Sugioka, H. Kawano, I. Ishikawa, A. Miyawaki M.D., and K. Midorikawa "Microchips fabricated by femtosecond laser micromachining in glass for observation of aquatic microorganisms", Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 68860D (12 February 2008); https://doi.org/10.1117/12.762966

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