8 February 2008 Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high-resolution laser projectors
Author Affiliations +
Abstract
We present two designs of two-dimensional gimbal microscanners with low vertical-scan frequencies of 70 Hz and 330 Hz and a high horizontal scan frequency of 30 kHz. The scanners are fabricated in a 30 μm silicon-on-insulator with backside structures for both mirror and gimbal-frame. The backside structure under the frame increases the frame weight and effectively reduces the resonant frequency of the rotation springs. The slow vertical scan can thus be achieved without reducing the spring width dramatically. A patterned backside structure also reinforces the mirror plate during actuation such that the root-mean-square dynamic deformation of the 1 mm diameter mirror is less than 44 nm (λ/10 for blue) at 10 degrees mechanical scan angle. A microscanner is installed into a prototype laser projector to demonstrate its capability of producing high quality images.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shu-Ting Hsu, Shu-Ting Hsu, Thomas Klose, Thomas Klose, Christian Drabe, Christian Drabe, Harald Schenk, Harald Schenk, } "Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high-resolution laser projectors", Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 688703 (8 February 2008); doi: 10.1117/12.761617; https://doi.org/10.1117/12.761617
PROCEEDINGS
13 PAGES


SHARE
RELATED CONTENT

CD uniformity improvement by active scanner corrections
Proceedings of SPIE (July 29 2002)
A novel out-of-plane micro-mirror actuator
Proceedings of SPIE (January 08 2008)
Low-cost microspectrometer
Proceedings of SPIE (August 21 2000)

Back to Top