Various types of large stroke actuators for Adaptive Optics (AO) were simulated individually and as part of a mirror
system consisting of actuators bonded to face plates with different boundary conditions. The actuators and faceplate
were fabricated using a high aspect ratio process that enables the fabrication of 3-dimensional Micro-Electro-Mechanical
System (MEMS) devices. This paper will review simulation results along with measurements of the displacement of the
actuators utilizing a white-light interferometer. Both simulations and interferometer scans have shown the ability of the
actuators to achieve displacements of 1/3 of the initial gap between the spring layer and the counter electrode.