8 February 2008 A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging
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Abstract
This paper presents the progress in the development of a 4096 element MEMS deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4μm of stroke, a surface finish of less than 10nm RMS, a fill factor of 99.5%, and bandwidth greater than 5kHz. The packaging and high speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.
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S. A. Cornelissen, P. A. Bierden, T. G. Bifano, "A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging", Proc. SPIE 6888, MEMS Adaptive Optics II, 68880V (8 February 2008); doi: 10.1117/12.770620; https://doi.org/10.1117/12.770620
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