Paper
12 August 1986 Performance of Oblique Angle of Incidence Collection Systems in the VUV
Geza L. Keller, Marion L. Scott, Kenneth Mitchell
Author Affiliations +
Abstract
High rejection filters are difficult enough to achieve in the UV-VIS-IR with known materials and constants. Even more difficult is the design and manufacture of rejection filters in the EUV and VUV given the uncertainty of optical constants and their wide variation over this spectral range. We have begun work to characterize materials from 584 Å to 1,300 Å to verify reported optical constants, in order to design and realize the optimum collection system.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Geza L. Keller, Marion L. Scott, and Kenneth Mitchell "Performance of Oblique Angle of Incidence Collection Systems in the VUV", Proc. SPIE 0689, X-Ray Calibration: Techniques, Sources, and Detectors, (12 August 1986); https://doi.org/10.1117/12.936586
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Cited by 1 scholarly publication.
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KEYWORDS
Laser induced fluorescence

Reflectivity

Silicon

Sensors

Contamination

Aluminum

Calibration

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