Experimental demonstration of waveguide-coupled corner-cut square resonators

Elton Marchena; Shouyuan Shi; Dennis Prather

doi:10.1117/12.764169

13 February 2008 Experimental demonstration of waveguide-coupled corner-cut square resonators

Elton Marchena, Shouyuan Shi, Dennis Prather

Proceedings Volume 6898, Silicon Photonics III; 689810 (2008) https://doi.org/10.1117/12.764169
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

In this paper we present the design, fabrication and characterization of waveguide-coupled corner-cut square resonators. The square resonators are attractive for multiple applications including sensors, filters and lasers. We use two- and three- dimensional finite difference time domain (FDTD) methods to optimize the performance of the square resonator. We show that the dropping efficiency for these type of microcavities depends on the gap between the waveguide and the cavity and the corner-cut length, which is defined as a distance c away from the cavity sidewalls. Fabrication of these corner-cut square-resonators is performed on Silicon-on-Insulator (SOI) by conventional E-beam lithography and dry etching. These processes were optimized to achieve vertical and smooth sidewalls in order to decrease scattering losses and they will be discussed in details below. Characterization of these corner-cut square resonators shows good performance and excellent agreement with the rigorous electromagnetic simulation. We will also discuss the potential application of using this design in combination with dispersion based Photonic Crystals (PhCs) to achieve lasing.

Citation Download Citation

Elton Marchena, Shouyuan Shi, and Dennis Prather "Experimental demonstration of waveguide-coupled corner-cut square resonators", Proc. SPIE 6898, Silicon Photonics III, 689810 (13 February 2008); https://doi.org/10.1117/12.764169

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