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13 February 2008 Fabrication and characterization of a thermo-mechanically tunable grating-assisted suspended waveguide filter
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Abstract
A silicon-on-insulator (SOI) rib waveguide integrated with a Bragg grating and nickel chromium heating elements has been fabricated. The heaters enable tuning of the Bragg wavelength through a thermo-optic effect. As the temperature is increased, the Bragg wavelength also increases due to the increasing silicon refractive index and effective mode index of the guide. The device is designed so that an additional processing step can remove the buried oxide beneath the grating to form a suspended waveguide. This structure would further decrease the power input required to tune the filter, and would allow the waveguide to buckle at a critical temperature. In this work the un-released structure is fabricated and mounted in a standard dual in-line pin (DIP) package to allow optical and electrical characterization. Test results demonstrating thermo-optic tuning show a 1 nm shift in Bragg wavelength with a power input of 58 mW.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. R. Raum, R. N. Tait, and R. C. Gauthier "Fabrication and characterization of a thermo-mechanically tunable grating-assisted suspended waveguide filter", Proc. SPIE 6898, Silicon Photonics III, 68981E (13 February 2008); https://doi.org/10.1117/12.778779
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