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24 November 1975 Optical Design Problems And Their Solutions In Miscellaneous Applications Of Lateral Interferometry
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Abstract
Some of the first uses of Lateral Interferometry, L.I., have been in applications in the areas of Laser Doppler Velocimeters (Ref. 1). During the past few years several new applications for L.I. have been proposed, some of which are aimed at filling important gaps in industrial instrumentation and precision noncontact measurement. The present paper summarizes progress that has been made in these and other newly discovered applications during the past year. Novel applications of Lateral Interferometry include determination of Optical Transfer Functions (OTF) of optical components and systems, and development of a new technique for noncontact monitoring submicroscopic surface defects of semiconductor blank surfaces. The paper also describes details of hardware development in these areas, unique optical design problems and their solutions. System characteristics of a working prototype of a fiber diameter monitor is given, together with a description of experience gained during the past months at demonstrations in the plants of different man-made fiber producing companies.
© (1975) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sandor Holly "Optical Design Problems And Their Solutions In Miscellaneous Applications Of Lateral Interferometry", Proc. SPIE 0069, Optical Design Problems in Laser Systems, (24 November 1975); https://doi.org/10.1117/12.954562
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