26 March 2008 Smoothing properties of single and multilayer coatings: a method to smoothen substrates
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Abstract
In this work we present the smoothing properties of our ion beam smoothened multilayers and, based on the same technology, the extreme smoothing properties in the high and near mid spatial frequency range of a single-material smoothing layer. Coating results of high reflectance multilayers both on rough substrates and on substrates smoothened with silicon bufferlayers are discussed.
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A. J. R. van den Boogaard, A. J. R. van den Boogaard, E. Louis, E. Louis, E. Zoethout, E. Zoethout, S. Alonso van der Westen, S. Alonso van der Westen, F. Bijkerk, F. Bijkerk, S. Müllender, S. Müllender, } "Smoothing properties of single and multilayer coatings: a method to smoothen substrates", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69210R (26 March 2008); doi: 10.1117/12.772479; https://doi.org/10.1117/12.772479
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