Author Affiliations +
Elsayed Hassanein
, Craig Higgins
, Patrick Naulleau
, Richard Matyi
Univ. at Albany (United States)
Gregg Gallatin
Applied Math Solutions, LLC (United States)
Gregory Denbeaux
, Alin Antohe
Univ. at Albany (United States)
Jim Thackeray
, Kathleen Spear
, Charles Szmanda
Rohm and Haas Microelectronics (United States)
Christopher N. Anderson
, Dimitra Niakoula
Lawrence Berkeley National Lab. (United States)
Matthew Malloy
, Anwar Khurshid
, Cecilia Montgomery
, Emil C. Piscani
, Andrew Rudack
, Jeff Byers
, Andy Ma
, Kim Dean
SEMATECH (United States)
Robert Brainard
Univ. at Albany (United States)