21 March 2008 Diffraction feature of microlens array with a small aperture size
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With the development of a CMOS Image Sensor (CIS), the pixel size of a CIS is continuously decreasing. It makes the photo diode smaller and smaller in the unit pixel and, as a result, the sensitivity is reduced at the same time. A micro lens (ML) is added to improve the sensitivity of CIS. The size of ML is reduced with the pixel size and it almost arrived at the limitation of the size which is governed by diffraction. In this paper, we simulate the diffraction feature of a ML with an electro-magnetic wave simulation. The efficiency and the crosstalk of some ML which have a size near the diffraction limit are calculated and compared. From the simulation result, we suggest a guide line of the ML design.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Seungryong Park, Seungryong Park, Jinho Park, Jinho Park, Hakyu Choi, Hakyu Choi, Young-Je Yun, Young-Je Yun, Kwangseon Choi, Kwangseon Choi, Jeahee Kim, Jeahee Kim, } "Diffraction feature of microlens array with a small aperture size", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69212O (21 March 2008); doi: 10.1117/12.772480; https://doi.org/10.1117/12.772480


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