3 April 2008 Gas phase study of the reactivity of optical coating materials with hydrocarbons using a desk-top size EUV laser
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Abstract
The reactivity of prospective capping layer extreme ultraviolet (EUV) mirror materials with hydrocarbons, alcohols, and water is studied in the gas phase using mass spectroscopy of metal-oxide clusters. We report the results of chemistry studies for Si, Ti, Hf, Zr, and Ru metal oxide nanoclusters in which the reaction products were ionized with little or no fragmentation by 26.5 eV photons from a desk-top size 46.9 nm Ne-like Ar laser. Hf and Zr oxides are found to be much less reactive than Si or Ti oxides in the presence EUV light. Ru oxides show different chemistry and are inactive with water/alcohols, and active with saturated/unsaturated hydrocarbons. The results are relevant to the design of EUV mirror capping layers that are resistant to carbon contamination.
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S. Heinbuch, S. Heinbuch, F. Dong, F. Dong, J. J. Rocca, J. J. Rocca, E. R. Bernstein, E. R. Bernstein, } "Gas phase study of the reactivity of optical coating materials with hydrocarbons using a desk-top size EUV laser", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69213F (3 April 2008); doi: 10.1117/12.791935; https://doi.org/10.1117/12.791935
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