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21 March 2008 At-wavelength reflectometry with a microfocus EUV tube
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Abstract
Reliable and compact extreme ultraviolet (EUV) laboratory sources are strongly required for in-house characterization of optical components and for the precise calibration of EUV diagnostic instruments. The EUV tube, based on the transfer of advanced microfocus x-ray tube technology into the EUV spectral range around 13.5 nm, is an important tool for these applications. Great benefits of this source are a compact and flexible design, debris-free operation, and high temporal and spatial long-term stability. Detailed characteristics of the source performance are reported and different examples for at-wavelength metrology are presented.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
André Egbert and Stefan Becker "At-wavelength reflectometry with a microfocus EUV tube", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69213W (21 March 2008); https://doi.org/10.1117/12.761188
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