Metrology characterization for self-aligned double patterning

Ami Berger; Sergey Latinsky; Maayan Bar-Zvi; Ram Peltinov; Jen Shu; Chris Ngai; James Yu; Huixiong Dai

doi:10.1117/12.774408

22 March 2008 Metrology characterization for self-aligned double patterning

Ami Berger, Sergey Latinsky, Maayan Bar-Zvi, Ram Peltinov, Jen Shu, Chris Ngai, James Yu, Huixiong Dai

Proceedings Volume 6922, Metrology, Inspection, and Process Control for Microlithography XXII; 692211 (2008) https://doi.org/10.1117/12.774408
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

Self-Aligned Double Patterning (SADP) scheme is considered as one of the most promising lithographic techniques to meet the challenges for aggressive flash 32 nm semiconductor technology node and beyond. Monitoring the SADP stages implies the necessity to use metrology methods that meet advanced technology nodes requirements. One important growing metrology factor is the Line Edge Roughness (LER). This factor is most relevant due to the unique processing of the outer vs. inner edges in the SADP process. The aim of the present study is to evaluate the right metrics to tightly monitor SADP process, including the roughness behavior of the features on SADP layers, and seek correspondence of LER characteristics between SADP sequential process stages. Additional element of this study will be to examine the performance of CD-SEM roughness analysis on small features, with the usage of improved LER measurement method that takes into account the contribution of SEM imaging noise to the obtained LER values.

Citation Download Citation

Ami Berger, Sergey Latinsky, Maayan Bar-Zvi, Ram Peltinov, Jen Shu, Chris Ngai, James Yu, and Huixiong Dai "Metrology characterization for self-aligned double patterning", Proc. SPIE 6922, Metrology, Inspection, and Process Control for Microlithography XXII, 692211 (22 March 2008); https://doi.org/10.1117/12.774408

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available