7 March 2008 Pixelated phase mask as novel lithography RET
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Abstract
Novel RET-Pixelated Phase Mask (PPM) is proposed as a novel Resolution Enhancement Technique (RET). PPM is made of pixels of various phases with lateral dimensions significantly smaller than the illuminating radiation wavelength. Such PPM with a singular choice of pixel dimensions acts as a mask with variable phase and transmission due to radiation scattering and attenuation on pixel features with the effective intensity and phase modulated by the pixel layout. Key properties of the pixelated phase masks, the steps for their practical realization, and the benefits to random logic products discussed. Wafer patterning performance and comparative functional yield results obtained for a 65nm node microprocessor patterned with PPM, as well as current PPM limitations are also presented.
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Yan Borodovsky, Wen-Hao Cheng, Richard Schenker, Vivek Singh, "Pixelated phase mask as novel lithography RET", Proc. SPIE 6924, Optical Microlithography XXI, 69240E (7 March 2008); doi: 10.1117/12.772116; https://doi.org/10.1117/12.772116
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