Integration of pixelated phase masks for full-chip random logic layers

Richard Schenker; Srinivas Bollepalli; Bin Hu; Kenny Toh; Vivek Singh; Karmen Yung; Wen-hao Cheng; Yan Borodovsky

doi:10.1117/12.771677

7 March 2008 Integration of pixelated phase masks for full-chip random logic layers

Richard Schenker, Srinivas Bollepalli, Bin Hu, Kenny Toh, Vivek Singh, Karmen Yung, Wen-hao Cheng, Yan Borodovsky

Proceedings Volume 6924, Optical Microlithography XXI; 69240I (2008) https://doi.org/10.1117/12.771677
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

This work describes the advantages, tolerances and integration issues of using Pixelated Phase Masks for patterning logic interconnect layers. Pixelated Phase Masks (PPMs) can act as variable high-transmission attenuated phase shift masks where the pixelated phase configuration simultaneously optimizes OPC and SRAF generation. Thick mask effects help enable PPMs by allowing larger minimum pixel sizes and phase designs with near equal sized zero and piphase regions. PPMs with a 3-tone pixel mask (un-etched glass, etched glass, chrome) offer more flexible patterning capability compared to 2-tone pixel mask (no chrome) style but at the detriment of a more complex mask making process. We describe the issues and opportunities associated with using PPMs for patterning a 65nm generation first level metal layer of a micro-processor.

Citation Download Citation

Richard Schenker, Srinivas Bollepalli, Bin Hu, Kenny Toh, Vivek Singh, Karmen Yung, Wen-hao Cheng, and Yan Borodovsky "Integration of pixelated phase masks for full-chip random logic layers", Proc. SPIE 6924, Optical Microlithography XXI, 69240I (7 March 2008); https://doi.org/10.1117/12.771677

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