1 April 2008 High-speed microlithography aerial image simulation without four-dimensional singular-value decomposition
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Abstract
The traditional Hopkins based microlithography aerial image simulation methods most likely require expensive 4D Singular Value Decomposition operations to obtain mutually incoherent kernels. This is often a problem when the requirement of resolution is high especially when sub-resolution assist features are present. During the process development and model fitting, kernels are required to generate frequently. In this paper, we demonstrate that it is not necessary to perform this expensive task to generate those kernels. By taking advantage of several classical matrix theories, we are able to directly extract kernels without resorting to 4D Singular Value Decomposition operations. The accuracy and efficiency will be extensively studied in the experimental results.
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Charlie Chung-Ping Chen, Charlie Chung-Ping Chen, } "High-speed microlithography aerial image simulation without four-dimensional singular-value decomposition", Proc. SPIE 6924, Optical Microlithography XXI, 69244Y (1 April 2008); doi: 10.1117/12.774048; https://doi.org/10.1117/12.774048
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