10 April 2008 A double-sided electret polymer film-based electrostatic actuator
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Abstract
A solution made from blending cycloolefin copolymer (COC) and polystyrene (PS) was proposed to create a double-sided electret polymer film. This electret polymer was then sandwiched to form an electret-metal-electret structure by using the MEMS processes. The upper and lower polymer layers were found to both enhance charge storage capacity significantly and to improve the machining property. It was identified that lower concentration of PS led to sphere-like morphology distributed uniformly within the COC/PS blends, which created better electret properties than that of pure COC or pure PS polymers. In addition, it was also found that these COC/PS blends have better adhesion to both metal and polymers. A series of processes developed to optimize this line of new electret polymers for actuator development are detailed. The recipe of this new material and the associated fabricating process to develop an electret loudspeaker are also detailed. In comparison, the pros and cons of this speaker system versus a typical electrostatic loudspeaker or a headphone, which require both bulky and expensive DC-to-DC converters, are detailed as well.
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Wen-Ching Ko, Wen-Ching Ko, Jia-Lun Chen, Jia-Lun Chen, Wen-Jong Wu, Wen-Jong Wu, Chih-Kung Lee, Chih-Kung Lee, } "A double-sided electret polymer film-based electrostatic actuator", Proc. SPIE 6927, Electroactive Polymer Actuators and Devices (EAPAD) 2008, 69271V (10 April 2008); doi: 10.1117/12.776002; https://doi.org/10.1117/12.776002
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