Design of dual-stage actuation system for high precision optical manufacturing

W. Dong; J. Tang; Y. ElDeeb

doi:10.1117/12.776557

18 April 2008 Design of dual-stage actuation system for high precision optical manufacturing

W. Dong, J. Tang, Y. ElDeeb

Author Affiliations +

Proceedings Volume 6928, Active and Passive Smart Structures and Integrated Systems 2008; 692828 (2008) https://doi.org/10.1117/12.776557
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2008, San Diego, California, United States

Abstract

Currently in optical machining systems, the voice coil actuator is implemented for servo control. The main obstacle that hinders the machining accuracy and efficiency is the limited bandwidth of voice coil. To fundamentally solve this issue, we develop a hybrid actuation system that consists of the voice coil that covers the coarse motion and a piezoelectric stack that induces the fine motion. The focus of this present research is the mechatronics synthesis of the actuation system through mechanism design. A series of numerical and experimental studies are carried out to optimally design the dual-stage actuation system that has adequate bandwidth at the system level while maintaining the stroke and alignment of the piezo stack. The performance of the new system is demonstrated via closed-loop system simulation.

Citation Download Citation

W. Dong, J. Tang, and Y. ElDeeb "Design of dual-stage actuation system for high precision optical manufacturing", Proc. SPIE 6928, Active and Passive Smart Structures and Integrated Systems 2008, 692828 (18 April 2008); https://doi.org/10.1117/12.776557

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