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26 March 2008 Development of an IrOx micro pH sensor array on flexible polymer substrate
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Abstract
pH sensor is an essential component used in many chemical, food, and bio-material industries. Conventional glass electrodes have been used to construct pH sensors, however, have some disadvantages in specific applications. It is difficult to use glass electrodes for in vivo biomedical or food monitoring applications due to size limitation and no deformability. In this paper, we present design and fabrication processes of a miniature iridium oxide thin film pH sensor array on flexible polymer substrates. The amorphous iridium oxide thin film was used as the sensing material. A sol-gel dip-coating process of iridium oxide film was demonstrated in this paper. A super-Nernstian response has been measured on individual sensors of the array with a slope of -71.6±3 mV/pH at 25°C within the pH range between 2.83 and 11.04.
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Wen-Ding Huang, Jianqun Wang, Thermpon Ativanichayaphong, Mu Chiao, and J. C. Chiao "Development of an IrOx micro pH sensor array on flexible polymer substrate", Proc. SPIE 6931, Nanosensors and Microsensors for Bio-Systems 2008, 693104 (26 March 2008); https://doi.org/10.1117/12.775856
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