A cellulose solution was prepared using N,N-dimethylacetamide (DMAc), LiCl, and natural pulp. Transparent
and smooth surface of the cellulose films were obtained after spin-coating and drying process. The cellulose films can be
utilized as a biodegradable and flexible microelectromechanical system (MEMS) due to its electro-active and actuation
properties. However, it is difficult to apply conventional lithography process to fabricate MEMS device because of its
hydrophilic and flexible nature. Therefore, we applied unconventional lithography process to overcome those problems.
Since polydimethylsiloxane (PDMS) has a modulus less than 10MPa, it is not suitable to fabricate high aspect ratio mold.
Polyurethaneacrylate (PUA) having a modulus in the range of several hundred was utilized as a mold for micro-contact
printing (MCP) process. Although high modulus PUA mold having more than 300MPa had edge defects during the
mold-releasing process from the photoresist, the PUA mold having a modulus between 100MPa and 300MPa did not
have the edge defect problem. Therefore, PUA mold with a modulus of 200MPa was used in this investigation. Gold was
deposited onto the PUA mold, and mercaptopropyltrimethoxysilane (MPTMS) self-assembly monolayer (SAM) was
fabricated to the gold surface. The gold was transferred to the cellulose film. The characteristics of the transferred gold
electrode on cellulose film were investigated using field emission scanning electron microscope (FESEM).