26 March 2008 Development of a high performance peristaltic micropump
Author Affiliations +
Abstract
In this study, a high performance peristaltic micropump has been developed and investigated. The micropump has three cylinder chambers which are connected through micro-channels for high pumping pressure performance. A circular-shaped mini LIPCA has been designed and manufactured for actuating diaphragm. In this LIPCA, a 0.1mm thickness PZT ceramic is used as an active layer. As a result, the actuator has shown to produce large out of plane deflection and consumed low power. During the design process, a coupled field analysis was conducted to predict the actuating behavior of a diaphragm and pumping performance. MEMS technique was used to fabricate the peristaltic micropump. Pumping performance of the present micropump was investigated both numerically and experimentally. The present peristaltic micropump was shown to have higher performance than the same kind of micropump developed else where.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
My Pham, My Pham, Nam Seo Goo, Nam Seo Goo, } "Development of a high performance peristaltic micropump", Proc. SPIE 6931, Nanosensors and Microsensors for Bio-Systems 2008, 69310K (26 March 2008); doi: 10.1117/12.775759; https://doi.org/10.1117/12.775759
PROCEEDINGS
10 PAGES


SHARE
Back to Top