Growth of CNT array for physiological monitoring applications

J. K. Radhakrishnan; H. Bhusan; P. S. Pandian; K. U. B. Rao; V. C. Padaki; K. Aatre; J. Xie; J. K. Abraham; V. K. Varadan

doi:10.1117/12.798231

31 March 2008 Growth of CNT array for physiological monitoring applications

J. K. Radhakrishnan, H. Bhusan, P. S. Pandian, K. U. B. Rao, V. C. Padaki, K. Aatre, J. Xie, J. K. Abraham, V. K. Varadan

Author Affiliations +

Proceedings Volume 6931, Nanosensors and Microsensors for Bio-Systems 2008; 69310P (2008) https://doi.org/10.1117/12.798231
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2008, San Diego, California, United States

Abstract

Carbon nanotube based electrodes can overcome the drawbacks posed by the conventional wet electrodes, used for physiological monitoring. Here, multiwalled CNT arrays were grown on highly doped n-type Si-wafers with Fe-catalyst layer, using a thermal CVD system. Acetylene was used as the carbon source gas, while Ammonia was the reducing gas and Argon was the purging inert gas, in these experiments. The thermal annealing of the catalyst layer and the carbon nanotube growth schedule, were optimized to get a dense and uniform multiwalled CNT array. SEM images reveal dense uniform growth of multiwalled carbon nanotubes over the entire catalyst deposited area. The cross-sectional images reveal a quasi-vertical alignment.

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J. K. Radhakrishnan, H. Bhusan, P. S. Pandian, K. U. B. Rao, V. C. Padaki, K. Aatre, J. Xie, J. K. Abraham, and V. K. Varadan "Growth of CNT array for physiological monitoring applications", Proc. SPIE 6931, Nanosensors and Microsensors for Bio-Systems 2008, 69310P (31 March 2008); https://doi.org/10.1117/12.798231

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