Scanning nanojet lithograph and microscope

Igor A. Timoshchenko

doi:10.1117/12.784903

28 December 2007 Scanning nanojet lithograph and microscope

Igor A. Timoshchenko

Proceedings Volume 6937, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007; 69373R (2007) https://doi.org/10.1117/12.784903
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007, 2007, Wilga, Poland

Abstract

The paper under consideration is actually an attempt to theoretically prove the possibility of creation of a sequential nanolithography method with ultimate parameters by using liquid nanojets from reactive elements in order to put the nanotechnology methods on a solid commercial basis. Detection of secondary radiation forming on the contact place of jet and target enables to use the device as scanning microscope.

Citation Download Citation

Igor A. Timoshchenko "Scanning nanojet lithograph and microscope", Proc. SPIE 6937, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007, 69373R (28 December 2007); https://doi.org/10.1117/12.784903

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