We report infrared micro-thermography measurements and analysis of static and transient temperature maps of
an actively heated micro-fabricated preconcentrator device that incorporates a dual serpentine platinum heater
trace deposited on a perforated polyimide membrane and suspended over a silicon frame. The sorbent coated
perforated membrane is used to collect vapors and gases that flow through the preconcentrator. After heating,
a concentrated pulse of analyte is released into the detector. Due to its small thermal mass, precise thermal
management of the preconcentrator is critical to its performance. The sizes of features, the semi-transparent
membrane, the need to flow air through the device, and changes in surface emissivity on a micron scale present
many challenges for traditional infrared micro-thermography. We report an improved experimental test-bed.
The hardware incorporates a custom-designed miniature calibration oven which, in conjunction with spatial
filtering and a simple calibration algorithm, allows accurate temperature maps to be obtained. The test-bed
incorporates a micro-bolometer array as the infrared imager. Instrumentation design, calibration and image
processing algorithms are discussed and analyzed. The procedure does not require prior knowledge of the
emissivity. We show that relatively inexpensive uncooled bolometers arrays can be used in certain radiometric
applications. Heating profiles were examined with both uniform and non-uniform air flow through the device.
The conclusions from this study provide critical information for optimal integration of the preconcentrator within
a detection system, and in the design of the heater trace layout to achieve a more even temperature distribution
across the device.