15 April 2008 Monolithic germanium SWIR imaging array
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Abstract
NoblePeak Vision has developed monolithic visible to short-wave infrared (SWIR) imaging arrays. An innovative growth technique is used to integrate germanium islands with the silicon transistors and metal layers of a CMOS process. Imaging arrays of 128x128 pixels at a 10 μm pitch were designed and fabricated, with the silicon photodiodes of a conventional CMOS imager replaced by germanium photodiodes. Broadband response from 400 nm to 1650 nm has been measured. Imaging die have been packaged with a Peltier cooler and built into a camera evaluation kit.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Conor S. Rafferty, Conor S. Rafferty, Clifford A. King, Clifford A. King, Bryan D. Ackland, Bryan D. Ackland, Ingvar Aberg, Ingvar Aberg, T. S. Sriram, T. S. Sriram, Jay H. O'Neill, Jay H. O'Neill, } "Monolithic germanium SWIR imaging array", Proc. SPIE 6940, Infrared Technology and Applications XXXIV, 69400N (15 April 2008); doi: 10.1117/12.782133; https://doi.org/10.1117/12.782133
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