17 April 2008 Innovative on-chip packaging applied to uncooled IRFPA
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Abstract
The Laboratoire Infrarouge (LIR) of the Laboratoire d'Electronique et de Technologie de l'Information (LETI) has been involved in the development of microbolometers for over fifteen years. Two generations of technology have been transferred to ULIS and LETI is still working to improve performances of low cost detectors. Simultaneously, packaging still represents a significant part of detectors price. Reducing production costs would contribute to keep on extending applications of uncooled IRFPA to high volume markets like automotive. Therefore LETI is developing an on-chip packaging technology dedicated to microbolometers. This paper presents an original microcap structure that enables the use of IR window materials as sealing layers to maintain the expected vacuum level. The modelling and integration of an IR window suitable for this structure is also presented. This monolithic packaging technology is performed in a standard collective way, in continuation of bolometers' technology. The CEA-LETI, MINATEC presents status of these developments concerning this innovating technology including optical simulations results and SEM views of technical realizations.
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Geoffroy Dumont, Agnès Arnaud, Pierre Impérinetti, Claire Vialle, Wilfried Rabaud, Valérie Goudon, Jean-Jacques Yon, "Innovative on-chip packaging applied to uncooled IRFPA", Proc. SPIE 6940, Infrared Technology and Applications XXXIV, 69401Y (17 April 2008); doi: 10.1117/12.780433; https://doi.org/10.1117/12.780433
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