16 April 2008 Tin dioxide thin film hydrogen nanosensor
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Abstract
We present the results of investigations of double-layer thin-film hydrogen sensors that show high sensitivity at low operating temperatures and improved reliability. These hydrogen sensors are manufactured using the both ion-plasma assisted sputtering and sol-gel technique. It was established that the highest sensitivity of the sensors occurred at 100-130°C. The hydrogen sensitivity depends on hydrogen concentration linearly starting at 50 ppm, and reaches 104 at 5000 ppm. The response time was 1-2 s and the recovery times were less than 10 s. We show that compared to constant power supply, pulse heating of the sensor improves the stability of the sensor, reduces the sensitivity to humidity, and reduces performance drift. Various possibilities of reducing CO gas cross sensitivity are also presented.
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V. M. Aroutiounian, V. M. Aroutiounian, A. Z. Adamyan, A. Z. Adamyan, Z. N. Adamyan, Z. N. Adamyan, A H. Arakelyan, A H. Arakelyan, } "Tin dioxide thin film hydrogen nanosensor", Proc. SPIE 6943, Sensors, and Command, Control, Communications, and Intelligence (C3I) Technologies for Homeland Security and Homeland Defense VII, 69430J (16 April 2008); doi: 10.1117/12.777334; https://doi.org/10.1117/12.777334
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